| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle with an adhesive layer which exhibits superior retaining performance in the fixation of foreign matter such as dust and has light resistance to a short-wavelength light such as excimer light inside a pellicle frame. SOLUTION: The pellicle 1 has a pellicle frame 2, a pellicle film 3 stretched on the frame 2 and an adhesive layer 5 disposed on the inside of the frame 2. The adhesive layer 5 contains a perfluoro-polyether whose number average molecular weight is in the range of 1,000-15,000.</p> |
