METHOD FOR PRODUCING MAGNESIUM OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To uniformly deposit a MgO film on a substrate. SOLUTION: A plasma electron current from a plasma gun 20 is spread into a sheet shape by the magnetic field to make into sheet plasma 27, a target 3 made of magnesium and a substrate 4 are oppositely arranged parallel across the sheet plasma 27 held, sputtering voltage is applied to the target 3, inert gas ions in the plasma are collided against the target 3 to generate magnesium vapor, and the magnesium vapor and gaseous oxygen fed from a manifold tube 11 disposed in the vicinity of the substrate 4 are reacted to deposit a magnesium oxide film on the substrate.