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发明名称
A method for reducing dishing related issues during the formation of shallow trench isolation structures
摘要
申请公布号
GB0113492(D0)
申请公布日期
2001.07.25
申请号
GB20010013492
申请日期
2001.06.04
申请人
AGERE SYSTEMS GUARDIAN CORPORATION
发明人
分类号
H01L21/76;H01L21/762
主分类号
H01L21/76
代理机构
代理人
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