| 摘要 |
PROBLEM TO BE SOLVED: To enhance accuracy in processing a surface facing medium, if the surface facing medium is processed by using a thin film magnetic head material having a slider part arranged in plural rows. SOLUTION: This polishing device is to polish a surface opposite to a surface acting as a surface facing medium in a block 20 which is a thin film magnetic head material formed by arranging each part acting as a slider containing the thin magnetic head material in plural rows. The jig 30 for polishing collectively holds plural blocks 20 on the surface plate 3. The polishing device is equipped with a reference position sensor 11 to detect a position on the upper surface of the reference base 13 as a reference position and a block thickness sensor 12 to detect the upper position of the polishing jig 30 as a position corresponding to the thickness of the block 20 changed by polishing. The polishing device recognizes an amount of polishing of the block 20 by using the sensors 11, 12, and polishing is controlled so as to have a designated value for the amount of polishing. |
