| 摘要 |
PROBLEM TO BE SOLVED: To provide a piping cleaning method and its apparatus for cleaning a exhaust pipe and the like, by removing a reactive product generated at a gas treatment unit effectively without hazards. SOLUTION: In this piping cleaning method and apparatus, a exhaust gas containing the reactive product from a gas treatment unit 1 is discharged through a pipe 2, using a vacuum pump 4. A trap 3 is provided at the disc pipe 2 between the gas treatment unit 1 and the vacuum pump 4, and the reactive product in the gas is trapped as a deposited material. At the non-treatment time of the gas treatment unit 1, ClF3 gas is fed to the solid deposited material through the pipe.
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