| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method to simply manufacture a zinc-oxide-based transparent electrode comprising zinc oxide with the addition of group III elements of the periodic table like aluminum and gallium, in which the amounts of the added elements are controlled, or the concentration and kinds of the added elements are controlled in the film-thickness direction. SOLUTION: On the upper layer or the lower layer of a zinc-oxide layer, a thin-film layer containing at least one kind of element selected from group III elements of the periodic table like aluminum or gallium is formed. The group III elements in the periodic table contained in the thin film are diffused into the zinc-oxide layer. For example, after a thin-film layer containing at least one kind of element selected from the group III elements of the periodic table is formed on a substrate like a glass substrate, a zinc-oxide layer is formed on the thin-film layer. In this case, in the process of the formation of the zinc-oxide layer or after the formation of the zinc-oxide layer, the group III elements of the periodic table contained in the above-mentioned thin-film layer are diffused into the zinc-oxide layer formed by a method like heating, and a zinc-oxide-based transparent electrode is manufactured.</p> |
