| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical component monitor device capable of monitoring the condition of the optical component of a laser machining apparatus and ensuring the machined quality of the laser machining apparatus, without trial irradiation. SOLUTION: A laser beam received by the monitor device 10 is transferred to an image receiving element 1 composed of a plurality of CCD sensors through lenses L1, L2 of an image relaying optical system, and the image received by the receiving element 1 is outputted to an arithmetic processor 2 which forms the intensity distribution of the optical energy received by the receiving element 1 an indicates it on a display 3. The intensity distribution of the laser beam at its passing or reflecting position on each optical component of the processing laser apparatus is measured by the monitor device 10 to easily detect the change of the intensity distribution of the laser beam due to the failure of the optical component, and hence the machined quality of the laser machining apparatus can be ensured.</p> |
