发明名称 POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERN AND ELECTRONIC PARTS
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which ensures high shelf stability of a solution of the composition, enhances dissolution contrast between unexposed and exposed parts and forms a pattern with high sensitivity and good resolution while maintaining a high rate of a residual film, a method for producing an accurate pattern of a good shape and high reliability electronic parts with a pattern obtained by the method. SOLUTION: The positive type photosensitive resin composition contains (A) a polyamide derivative having an aromatic ring and having a phenolic hydroxyl group in at least one end of its molecular chain and (B) a compound which forms an acid under light.
申请公布号 JP2001174996(A) 申请公布日期 2001.06.29
申请号 JP19990361263 申请日期 1999.12.20
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 YAMAZAKI NORIYUKI;NUNOMURA MASATAKA;ANZAI TAKANORI
分类号 H01L21/027;C08G73/10;C08L79/08;G03F7/004;G03F7/037;G03F7/039 主分类号 H01L21/027
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