发明名称 |
POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERN AND ELECTRONIC PARTS |
摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which ensures high shelf stability of a solution of the composition, enhances dissolution contrast between unexposed and exposed parts and forms a pattern with high sensitivity and good resolution while maintaining a high rate of a residual film, a method for producing an accurate pattern of a good shape and high reliability electronic parts with a pattern obtained by the method. SOLUTION: The positive type photosensitive resin composition contains (A) a polyamide derivative having an aromatic ring and having a phenolic hydroxyl group in at least one end of its molecular chain and (B) a compound which forms an acid under light. |
申请公布号 |
JP2001174996(A) |
申请公布日期 |
2001.06.29 |
申请号 |
JP19990361263 |
申请日期 |
1999.12.20 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD |
发明人 |
YAMAZAKI NORIYUKI;NUNOMURA MASATAKA;ANZAI TAKANORI |
分类号 |
H01L21/027;C08G73/10;C08L79/08;G03F7/004;G03F7/037;G03F7/039 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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