| 摘要 |
PROBLEM TO BE SOLVED: To provide an unmanned transportation vehicle which covers both sides of a cassette 22 with a shutter 8 so that the cassette 22 can be disposed in a flow of clean air from a filter fun unit 6 during transportation and turns the shutter 8 to allow the cassette 22 to be transferred through an opening at the time of transferring. SOLUTION: The cylindrical shutter 8 having opening is provided so as to cover the cassette 22 conveyed by the unmanned transportation vehicle 2 and mounted on the upper filter fan unit 6, and the shutter 8 is turned by a rotating motor 10. |
