METHOD FOR MANUFACTURING OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical device of a silica base on a silicon substrate. SOLUTION: This optical device has a clad layer formed within the silicon substrate. The optical device has an active region which is formed on the clad layer. The clad layer is formed by forming a region of porous silicon on the silicon substrate. The porous silicon is thereafter oxidized and is made higher in density. The active region of the optical device after the treatment to make the density higher is formed on the clad layer.