| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a tactile sensor loading a nanowire and its production method. SOLUTION: The tactile sensor device capable of using as a high resolution tactile detection function is disclosed. The sensor can be used as a tactile shear sensor. It comprises a circuit substrate, an array of contact pad on the circuit substrate and a set of nanowire attached on each contact pad. The contact pad is isolated from or formed with the matrix of material cross strip. Each set of nanowire is provided with at least one nanowire or desirably a plurality of vertically arrayed nanowires of the same length. When an object contacts at least one nanowire in a set of a plurality of nanowires, the set bends and the object contacts another set of nanowires. To determine whether a connection is formed between them, the position of the object and the motion activity can be detected by electrically surveying a pair of contact pads.</p> |
