| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump having the number of structural parts reduced clearly more than that of a normal structure. SOLUTION: This turbo molecular pump comprises rotor disks 10 and stator disks 14. A pump cylindrical housing comprises at least two parts divided along a cylindrical shaft 5, and these parts form integrated structural units 12 and 12' together with the corresponding divided parts of the stator disks 14.
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