| 摘要 |
PROBLEM TO BE SOLVED: To suppress the warpage of a joined body of a target material for sputtering and a backing plate material at the time of joining both materials, moreover to reduce the residual strain of the joined body generated by the application of mechanical stress to the joined body and to obtain the same joined body. SOLUTION: A joined body in which a brazing filler metal is interposed between a target material and a plate material is heated, thereafter, at the time of its cooling, the amount of warpage generated along with the cooling is discontinuously measured, and each time, reverse warpage offsetting the generated warpage is applied thereon.
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