| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric resonance parts with built-in capacitance which is reduced in variations of electrostatic capacitance. SOLUTION: In the piezoelectric resonance parts with built-in capacitance, dielectric substrates 3 and 4 are laminated on and below an energy confinement type and plate-like piezoelectric resonance element 2 while keeping vibration spaces 5 and 6 which are secured so as not to disturb vibrations of a piezoelectric vibration part. 1st and 2nd capacitance forming electrodes 7 and 8 are formed on the substrates 3 and 4 in the direction parallel to the principal surfaces of both substrates with a prescribed gap G secured between them. The 2nd electrode 8 is put on the spaces 5 and 6 via the whole or a part of both substrates 3 and 4. When a distance between the electrode 8 and an end part 5a of the space 5 along the opposite direction of both electrodes 7 and 8 is defined as G', G'/G is set at >=1 or <=-0.4.
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