| 摘要 |
PURPOSE:To excellently detect foreign matters without relying on the transmittance of a pellicle at the time of detecting the foreign matters by scanning the surface of a substrate to be inspected mounted with the pellicle. CONSTITUTION:A pellicle transmittance measuring section 1 is provided separately from a foreign matter inspecting section 2 and the section 1 measures the transmittance Ti0 (x) and Ts0 (x) of a reference pellicle and stores the measured transmittance in a first register 20. The section 2 stores a sensitivity correcting value C0 (x) found from the signal obtained by receiving scattered light from the standard particle of a reticle through the reference pellicle in a second register 25. Detecting signals S2 (x) obtained by the section 2 are corrected based on the transmittance of the reference pellicle and sensitivity correcting value. |
