METHOD AND APPARATUS FOR DIFFERENTIAL ILLUMINATION IMAGE-CAPTURING AND DEFECT HANDLING

摘要

An image processing system is disclosed. The system includes a first light source operable to illuminate an image plane in a first direction and a second light source operable to illuminate the image plane from a second direction. Also included is a sensing device operable to detect light from the first and second light source that interacted with the image plane. A processor operable to receive information from the sensing device and determine an image and image defects is coupled to the sensing device.