| 摘要 |
PROBLEM TO BE SOLVED: To prevent a circulation system of a contained liquid from being damaged by completely and automatically removing dust accumulated in a separator tank per each batch. SOLUTION: An exhaust gas pipe line 12 is connected to a single crystal lifter 11, and an inert gas supplied to the lifter is sucked by a liquid-sealed vacuum pump. A sealed liquid 15 in the vacuum pump is circulated through a separator tank 23 and a sealed liquid cooler 26 by a circulation pump 25, and the sealed liquid in the separator tank can be discharged by a sealed liquid- discharge valve 32. A cleaning nozzle 33 is disposed in the separator tank, and a high pressure cleaning liquid 35 is supplied to the cleaning nozzle by a cleaning liquid supply means 34. When the vacuum pump is stopped, a controller controls a sealed liquid discharge valve and the cleaning liquid supply means. Thereby, the sealed liquid in the separator tank is discharged, and the cleaning liquid is jetted from the cleaning nozzle.
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