| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum sample transfer apparatus which is easily adaptable to sample kinds, suitable for use as a general-purposed machine, comparatively compact and superior in safety and cost performance. SOLUTION: This apparatus houses a plurality types of holders adapted to various kinds of samples in magazines, including wafers, enables automatic transfer of holders to an evacuated load chamber magazines, comprises a vacuum chamber which changes the pressure between the vacuum pressure of the load chamber and outside air pressure, enables automatic transfer of wafers housed in cassettes to holders of the load chamber via the station of the vacuum chamber, changes the holders in the load chamber to specified wafer holders when changing the sample kind, transfers and arranges the wafers on the holders, or replaces and transfers in advance the holders with samples mounted to the load chamber, and sends the holders to the stage of an evacuated work chamber to execute processings such as length measurement. |
