| 摘要 |
PROBLEM TO BE SOLVED: To accurately evaluate optical performance such as an aberration of a measurement object such as a corner cube. SOLUTION: A measurement reflection unit 7 is put between a reference reflection unit 5 and a corner cube 6, and a double path system arrangement is formed. Light flux emitted from a laser 1 is transmitted through the reference reflection unit 5 and the corner cube 6 so as to be reflected on the measurement reflection unit 7, and then, returned to an interference meter main body via the corner cube 6 and the reference reflection unit 5 in this order. The phase of a boundary line image between the reflection face and the transmission face in the measurement unit 7 projected onto an observation face and the phase of a ridge line or a ridge line image of the corner cube 6 also projected onto the observation face are turned by an angle of about 30 degrees around the optical axis so as to be inspected.
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