| 摘要 |
PURPOSE: A pattern inspection apparatus is provided to use a universal image processing apparatus by detecting irregular defects in self image information without setting and storing a standard pattern or employing a large memory. CONSTITUTION: A pattern inspection apparatus comprises a CCD line camera(110), a CCD area camera(112), a frame grabber(114), a 4-axis robot(120), a motion controller(122), a sync signal generator(130), a DIO(digital input/output) interface(132), and a host computer(140). The CCD line camera(110) obtains a pattern image of a panel line by line. The CCD area camera(112) obtains an image in a defect area. The frame grabber(114) extracts a defect from the image inputted from the cameras(110,112). The robot(120) moves the panel under control of the controller(122). The sync signal generator(130) generates a sync signal to operate the frame grabber(114). The DIO interface(132) controls switches, buttons and an actuator.
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