| 摘要 |
PROBLEM TO BE SOLVED: To provide a cylindrical capacitance type torsion strain sensor having a simple structure and stable characteristics, which can convert twisting strain values from changes in capacitance to changes in frequency to facilitate signal processing. SOLUTION: This sensor, where the end of the sensor fixed to a pedestal 8 and one axial direction of the sensor is extended as the center axis, comprises capacitance provided by a pair of electrode patterns so as to have a plurality of spiral wire shaped electrodes 3a, 4a extending spirally in parallel so as to creep into the one axial direction at a tilt angle of approximate 45 degrees each other from a pair of annular wire-shaped electrodes 3, 4, which are opposed to an outer circumferential face of dielectric film layer 2 that dielectric varies by strain, which is formed so that the sectional shape of an outer circumferential face of the sensor is formed almost uniform in thickness on an outer circumferential face of an insulation rod 1 made of nonconductive plastic as a detected structure forming a circle. The annular wire shaped electrodes 3, 4 are connected to capacitor terminals, and thereby a pair of electrode patterns is used as a capacitor.
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