PRODUCTION OF OPTICAL WAVEGUIDE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a process for producing an optical waveguide element capable of forming an indium-containing transparent oxide electrode which comes into contact with an optical waveguide consisting of a ferroelectric thin film without impairing the electro-optic characteristics of the optical waveguide element. SOLUTION: This process for producing the optical waveguide element has an optical waveguide forming stage for forming the optical waveguide consisting of the ferroelectric thin film on a substrate, an electrode forming stage for forming the indium-containing transparent oxide electrode which comes into contact with the optical waveguide to a prescribed shape at a temperature above 0 deg.C and below 150 deg.C in an oxygen-containing atmosphere and an annealing treatment stage for subjecting the formed transparent oxide electrode to an annealing treatment.