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发明名称
ULTRA HIGH-SPEED CHIP INTERCONNECT USING FREE-SPACE DIELECTRICS
摘要
申请公布号
KR20010020476(A)
申请公布日期
2001.03.15
申请号
KR19997012124
申请日期
1999.12.22
申请人
null, null
发明人
모스레히,메히알데드
分类号
H01L21/316;H01L21/318;H01L21/768;H01L23/522;H01L23/532
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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