| 摘要 |
PROBLEM TO BE SOLVED: To realize a photo-receiving element array having substantially fine array pitches by line/space machining with margin to provide a photo-electric type encoder enhanced in a yield and reliability. SOLUTION: This device has a scale member and a sensor head for reading a scale grating thereof, the sensor head is provided with an LED, an index scale for transmitting output light of the LED to irradiate a scale member, and a photo-receiving element array 5 for detecting the light modulated by the scale grating to output a displacement signal, and the photo-receiving array 5 has a substrate 50, a first photo-receiving element group 51a formed by a first layer semiconductor thin film formed on the substrate 50, an insulation film 24 for covering the first photo-receiving element group 51a, and a second photo-receiving element group 51b formed by a second layer semiconductor thin film formed on the insulation film 24 to receive the transmitted light in a space of the first photo-receiving element group 51a.
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