| 摘要 |
PROBLEM TO BE SOLVED: To control inclination of a probe by coupling a push-up means to the forward side edge of a head plate, thereby, making smooth the open/close operation of the head plate and making uniform the deformation thereof. SOLUTION: This probe 10 comprises a loader chamber 11 for carrying a wafer, a probe chamber 12 for inspecting the wafer, and a head plate 13 having a central hole 13A can be fixed freely and removably with a probe card. As a means for pushing up the head plate 13 constituting a mechanism 14 for making smooth open/close operation of the head plate, first, second and third gas springs 16, 17 and 18 are provided, while being coupled in series and the rod 16A of the first gas spring 16 is coupled, at the forward end thereof, to the forward side edge of the head plate 13. According to the structure, a push-up force is reduced, deformation of the head plate 13 is made uniform, deformation of the probe card is restrained and inspection reliability of the wafer can be enhanced.
|
