Method and apparatus for detection of concentration of hydrogen peroxide vapor

摘要

Real-time and accurate detection of the concentration of hydrogen peroxide vapor supplied into a treatment vessel is made possible by a method and apparatus that permits efficient and effective sterilization, disinfection, or the like with hydrogen peroxide vapor. The concentration of hydrogen peroxide vapor in a treatment vessel is detected by a semiconductor gas sensor in a treatment system where an object to be treated is brought into contact with hydrogen peroxide vapor in a treatment vessel with the pressure fixed at a constant level. The output of the semiconductor gas sensor is revised by an arithmetic unit in relation to the temperature and/or the humidity in the treatment vessel detected on the basis of data, worked out in advance, representing the correlation between the output of the semiconductor gas sensor and the concentration of hydrogen peroxide vapor in which the temperature and/or the humidity are parameters, and the value thus revised is indicated on a concentration indicator as concentration of hydrogen peroxide.