发明名称 Dresser and dressing apparatus
摘要 <p>A dresser (21) for dressing a polishing pad used for polishing a material to be polished is disclosed, the dresser (21) comprising: a dresser principal (22) and a dressing-working part (23) which is provided as a body other than the dresser principal (22); and a holding means for holding the dressing-working part (23) in such a manner that the dressing-working part (23) can be attached to and detached from the dresser principal (22). <IMAGE></p>
申请公布号 EP1075898(A2) 申请公布日期 2001.02.14
申请号 EP20000116133 申请日期 2000.07.31
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 TANAKA, HIROSHI;RIKITA, NAOKI;ATAKA, YOSHITADA;OWADA, ISAO
分类号 H01L21/304;B24B53/017;B24B53/12;B24D7/06;(IPC1-7):B24B37/04;B24B53/007 主分类号 H01L21/304
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