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发明名称
System und Verfahren zur gleichzeitigen Prozess- und Device-Simulation
摘要
申请公布号
DE69426507(D1)
申请公布日期
2001.02.08
申请号
DE19946026507
申请日期
1994.06.24
申请人
NEC CORP., TOKIO/TOKYO
发明人
TAMEGAYA, YUKIO
分类号
H01L29/00;G06F17/50;H01L21/00;(IPC1-7):G06F17/50
主分类号
H01L29/00
代理机构
代理人
主权项
地址
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