| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter detection apparatus of a transparent ingot capable of inspecting foreign matter efficiently and certainly and a transparent object producing method high in productivity using the same. SOLUTION: A foreign matter detection apparatus of a transparent ingot has a container 3 housing a transparent ingot Ig to be inspected and provided with a window part 2 formed of transparent window members 2a1, 2b1 having the same refractive index as the transparent ingot Ig, the transparent liquid 4 having the same refractive index as the transparent ingot Ig put in the container 3, an inspection light generating means 5 for irradiating the transparent ingot Ig, an imaging means 6, an ingot moving means 7 moving the imaging position of the transparent ingot Ig, a camera moving means 8 for moving the imaging means 7 so as to move the imaging position of the imaging means 6, an image processing means 9 obtaining foreign matter data from the foreign matter image signal of the foreign matter of the transparent ingot Ig, a foreign matter data output means 10 and a control means 11 for controlling these means. A transparent object producing method using this apparatus is provided.
|
