| 摘要 |
PROBLEM TO BE SOLVED: To provide a regular reflection type displacement gauge which can reduce error due to inclination of a surface to be measured, by installing a biaxial optical system. SOLUTION: This displacement gauge is equipped with an optical system including a light irradiating means casting a light on an object to be measured and a light receiving element receiving a light reflected from the object, and an operation processing means processing an output signal from the light receiving element and obtaining position information of the object. Two sets of the optical systems having the same irradiation point of lights on the object are installed. A first optical system 10 and a second optical system 20 are installed in the position relation that at least a light entering a light receiving element 12 of the first optical system 10 and a light entering a light receiving element 22 of the second optical system 20 are displaced in the opposite direction when the object is inclined. The operation processing means corrects measurement error caused by the inclination of the object to be measured on the basis of at least an output signal of the element 12 of the first system 10 and an output signal of the element 22 of the second system 20, and obtains position information of the object to be measured.
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