| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce contamination substance between an end effector and a substrate by bringing a pair of opposing surfaces of the end effector in contact with a substrate via the substrate edge and raising a pair of end effectors to support the substrate. SOLUTION: A clamp-type end effector 11 is provided with the first pair of opposed surfaces 13a-b which are simultaneously in contact with the edge of a vertically oriented substrate supported with the same effector, and the second pair of opposed surfaces 15a-b which are simultaneously in contact with the vertical oriented substrate supported with the same effector. These first pair of opposed surfaces 13a-b and the second pair of opposed surfaces 15a-b are extended from the point C centered to the diameter of the substrate in almost the same distances (x) and (y), and are supported in contact with the substrate in the equal distance from the diameter of the substrate in order to raise the pair of end effectors 11. As a result, a contamination substance between a pair of end effectors 11 and substrate can be reduced.</p> |
