| 发明名称 |
MICRO-MACHINED MIRROR DEVICE |
| 摘要 |
A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T - shaped hinges and includes travel stops that limit motion of the mirror in t he x-, y-, and z-directions. The top and bottom micro machined caps also includ e travel stops that limit motion of the mirror in the z-direction.
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| 申请公布号 |
CA2378736(A1) |
申请公布日期 |
2001.01.18 |
| 申请号 |
CA20002378736 |
申请日期 |
2000.07.13 |
| 申请人 |
INPUT/OUTPUT, INC. |
发明人 |
RIED, ROBERT P.;SCHMIDT, MARTIN A.;YU, DULI;YU, LIANZHONG;GOLDBERG, HOWARD D. |
| 分类号 |
G02B26/10;B81B3/00;G02B7/182;G02B26/08;G06K7/10;(IPC1-7):G02B7/182 |
主分类号 |
G02B26/10 |
| 代理机构 |
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