| 摘要 |
PROBLEM TO BE SOLVED: To improve the hydropholic properties and electric conductivity of the surface of a coating film without deteriorating the various characteristics of the coating film itself by forming a carbon coating film on a substrate by a plasma CVD method, irradiating the surface of the coating film with plasma to change the surface. SOLUTION: A carbon coating film is formed on a substrate 8, and after that, gaseous Ar, gaseous N2, gaseous H2 or gaseous CF4 is successively introduced from a gas introducing tube 5. Then, microwave electric power is supplied from a microwave generating device 1 to generate the plasma of the introduced gas, which is cast on the substrate 8. Simultaneously, high-frequency electric power is supplied from a high-frequency power source 10 so as to control the self-bias voltage generate on the substrate 8 to about -50 V. In this way, a modified layer is formed on the surface part of the carbon coating film on the substrate 8. In this modified layer, the improvement of hydrophobic properties is shown, moreover, change is not shown in its wear resistance, its friction coefficient is reduced, and the sliding characteristics thereof are improved. Moreover, its electric conductivity is remarkably improved. |
