APPARATUS FOR CRYSTALLIZING DIAMOND FILM BY DIRECT CURRENT PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION

摘要

PURPOSE: An apparatus for crystallizing diamond film by DC PACVD is provided for maximizing degree of crystallization and uniformity and minimizing temperature differences between anodes to eliminate unstability of the apparatus. CONSTITUTION: The DC PACVD apparatus has seven anodes each of them being fixed to top plate (11) connected with a vacuum chamber (1) by O-ring (12). The anode is jointed to copper block (6) by suspending bar (5) and consequently to DC power supply (8) through ballast resistance (9). The anode has a smaller diameter than for such suspending bar to prevent heat of anode from transferring into such copper block to effectively maintain temperature of the anode to 2000 deg.C or more.