| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramics heater not to be a contamination source for a semiconductor substrate, preventing deformation or breakage due to heat impact, having high-temperature strength durably used in a high temperature area and excellent product life and securing air-tightness between the substrate and a heater element for a long time. SOLUTION: This ceramics heater is provided with a substrate 2 of an aluminum nitride sintered body or aluminum group sintered body, a covering plate 3 of the aluminum nitride group sintered body or aluminum group sintered body covering the entire area of the substrate 2, a heater element 1 of a conductive silicon carbide sintered body interposed between the substrate 2 and the covering plate 3 and at least a pair of supply electrodes 9, one end thereof being connected to the heater element 1. The substrate 2 and the covering plate 3 are constituted so as to be air-tightly joined by a binder. |
