| 摘要 |
PROBLEM TO BE SOLVED: To measure a cut, a roughness on the surface of a pellet at a higher accuracy. SOLUTION: A linear light beam is scanned on a surface to be inspected. A luminescent line generated by irradiation of the surface is photographed to form a linear image. A displacing portion 33 of the image is detected to obtain a displacing area where the site 33 is generated. Thus, an irregular area of the surface to be inspected is found in two-dimensional coordinates specified on the surface. The irregular area is enlarged, based on a density of the surface to be inspected, and a cut area is calculated more severely. Further, a luminance change of a dynamic point of the surface is detected, surface roughness is patterned, and its roughness can be detected according to the pattern.
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