发明名称 VACUUM-SUCTION DEVICE AND SUCTION-TRANSFER DEVICE EQUIPPED THEREWITH
摘要 <p>PROBLEM TO BE SOLVED: To provide a vacuum-suction device capable of performing suction and separation of an object to be sucked in a proper manner with a simple structure, and also allowing cost reduction. SOLUTION: This vacuum-suction device is provided with: a vacuum pump 21; a vacuum pad 6 which is reduced in pressure by the vacuum pump 21 for sucking an object to be sucked; and a switching means 22. The switching means 22 selectively connects a suction port 21a and an exhaust port 21b of the vacuum pump 21 to the pad 6 for suction and separation of the object to be sucked.</p>
申请公布号 JP2000343471(A) 申请公布日期 2000.12.12
申请号 JP20000079495 申请日期 2000.03.22
申请人 RIGAKU INDUSTRIAL CO 发明人 SUMII HIROSHI
分类号 G01N23/223;B25J15/06;B65H3/08;G01N1/00;H01L21/677;H01L21/68;(IPC1-7):B25J15/06 主分类号 G01N23/223
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