发明名称 |
Method and apparatus for cleaning treatment |
摘要 |
An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.
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申请公布号 |
US6159288(A) |
申请公布日期 |
2000.12.12 |
申请号 |
US19970935917 |
申请日期 |
1997.09.23 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SATOU, FUMIO;SAKAI, MITSUHIRO;TSUKAMOTO, TAKESHI;HONDA, YOICHI;YAMAGUCHI, KIYOMITSU;MOTODA, KIMIO;MATSUDA, YOSHITAKA;SADA, TETSUYA;TATEYAMA, KIYOHISA |
分类号 |
B05C11/08;(IPC1-7):B05C9/06;B05C11/00 |
主分类号 |
B05C11/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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