| 摘要 |
PROBLEM TO BE SOLVED: To realize an operation method for a batch-type thermal treatment apparatus, where works can be uniformly and reproducibly subjected to a thermal treatment through their surfaces and batches, even if an empty region where no works are mounted is present in the apparatus. SOLUTION: In the operating method of a batch-type thermal treatment apparatus, a work holder 10 which holds a plurality of works W is inserted into a treatment chamber 8, and the works W are subjected to a prescribed treatment making treating gas flow from the one end to other end of the treatment chamber 8. When the works W whose number is smaller than the maximum number of works held by the work holder 10 are treated, the works W are held being gathered on the upper side of the treatment gas flow, and dummy works DW are held immediately on the downstream side of the works W in the treatment gas flow.
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