| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emitting element together with its manufacturing method, easily manufacturable and excellent in field emitting characteristics, and provide a display device equipped with such an electron emitting element and its manufacturing method. SOLUTION: A cathode electrode layer 12 and an aluminum layer 13 are formed on a bed substrate 11, and patterned resist films 14 are formed on the aluminum layer 13. Then, electrolysis is performed with the cathode electrode layer 12 used as a positive electrode, Honeycomb-structured, rugged parts 16 having honeycomb-like holes 16a are formed in areas having no resist films 14 formed therein. The diameter of the projecting parts in the rugged parts and the distance between neighboring projecting parts can be controlled by adjusting the conditions for the electrolysis. Then, electron emitting parts 17 are selectively formed on the projecting parts in the rugged parts 16. The electron emitting parts 17 thus formed can have sharpness easily. A field emitting type cathode so obtained is ready to bring about the concentration of an electric field, and applying a low voltage enables electrons to be emitted from the electron emitting parts 17.</p> |
