发明名称 DIELECTRIC BARRIER GAS REACTORS WITH NON-AXIAL FLOW
摘要 A dielectric barrier reactor for the plasma-assisted processing of a gaseous medium in which the gaseous medium is constrained to pass between the co-axial electrodes with axial, radial and circumferential gas flow components combinations of which result in the gas flow being at least partially helical and/or spiral.
申请公布号 WO0071866(A1) 申请公布日期 2000.11.30
申请号 WO2000GB01881 申请日期 2000.05.15
申请人 AEA TECHNOLOGY PLC;ANDREWS, PETER, JAMES;BEECH, PHILIP, MICHAEL;MARTIN, ANTHONY, ROBERT;NG, KA, LOK;SHAWCROSS, JAMES, TIMOTHY;WEEKS, DAVID, MICHAEL;REYNOLDS, DAVID, ALLEN 发明人 ANDREWS, PETER, JAMES;BEECH, PHILIP, MICHAEL;MARTIN, ANTHONY, ROBERT;NG, KA, LOK;SHAWCROSS, JAMES, TIMOTHY;WEEKS, DAVID, MICHAEL;REYNOLDS, DAVID, ALLEN
分类号 H05H1/24;B01D53/32;B01J19/08;F01N3/02;F01N3/08;F01N3/28;(IPC1-7):F01N3/08 主分类号 H05H1/24
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