发明名称 |
MASK LAYOUT FOR MANUFACTURING BANK |
摘要 |
PURPOSE: A mask layout for manufacturing a bank is provided to prevent a pattern defect, by moving a pattern on a mask vertically and horizontally, and by forming identical patterns along a direction of a scanner. CONSTITUTION: In a mask layout wherein patterns for a plurality of banks are formed, identical patterns are formed by transferring one of the patterns on the mask vertically and horizontally. The identical patterns can also be formed along a direction of a scanner by transferring the pattern on the mask vertically and horizontally. |
申请公布号 |
KR20000067353(A) |
申请公布日期 |
2000.11.15 |
申请号 |
KR19990015086 |
申请日期 |
1999.04.27 |
申请人 |
SAMSUNG ELECTRONICS CO, LTD. |
发明人 |
PARK, JE MIN;JANG, SUN GYU |
分类号 |
G03F9/00;G03F1/42 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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