发明名称 MASK LAYOUT FOR MANUFACTURING BANK
摘要 PURPOSE: A mask layout for manufacturing a bank is provided to prevent a pattern defect, by moving a pattern on a mask vertically and horizontally, and by forming identical patterns along a direction of a scanner. CONSTITUTION: In a mask layout wherein patterns for a plurality of banks are formed, identical patterns are formed by transferring one of the patterns on the mask vertically and horizontally. The identical patterns can also be formed along a direction of a scanner by transferring the pattern on the mask vertically and horizontally.
申请公布号 KR20000067353(A) 申请公布日期 2000.11.15
申请号 KR19990015086 申请日期 1999.04.27
申请人 SAMSUNG ELECTRONICS CO, LTD. 发明人 PARK, JE MIN;JANG, SUN GYU
分类号 G03F9/00;G03F1/42 主分类号 G03F9/00
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