POWER SUPPLY AND DISCHARGE LAMP LIGHTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a power supply that can reduce harmonic noise, while keeping impedance match with a load. SOLUTION: This power supply system generates high frequency power from a high-frequency power supply circuit to a load via a matching circuit 3. Between the high-frequency power supply circuit 2 and the matching circuit 3, a noise filter 4 that is designed as a low-pass filter formed of an inductor La1 and a capacitor Ca1 is inserted. The cut-off frequency of the noise filter 4 is set higher than the output frequency of the high-frequency power supply circuit 2 for reducing the harmonics noise that is higher than this cut-off frequency.