| 摘要 |
PROBLEM TO BE SOLVED: To realize displacement measurement of high precision to an object to be measured at a high speed in a short time, by constituting an imagery lens part in an array type along the scanning direction, in each of the specified number of condenser lens parts, and enlarging the scanning width of an irradiation point. SOLUTION: A light receiving means 6 comprises a condenser lens array C, an imagery lens array F and a photodetector group P. In the condenser lens array C, a plurality of condenser lens parts C1-Cn which have uniform imagery characteristics around an optical axis are constituted along the scanning direction of an irradiation light, and a measuring light is converged. In the imagery lens array F, a plurality of imagery lens parts F1-Fm which have uniform imagery characteristics around an optical axis are constituted in each of the specified number of condenser lens parts C1-(C6) along the scanning direction of the irradiation light, and a converged measuring light forms images on a light receiving surfaces P1a-Pma. The photodetector group P has photodetectors P1-Pm in each of the imagery lens parts F1-Fm.
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