发明名称 Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
摘要 Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
申请公布号 US6141102(A) 申请公布日期 2000.10.31
申请号 US19990232257 申请日期 1999.01.19
申请人 J. A. WOOLAM CO. INC 发明人 JOHS, BLAINE D.;HERZINGER, CRAIG M.;GREEN, STEVEN E.
分类号 G01J3/28;G01J4/00;(IPC1-7):G01J4/00 主分类号 G01J3/28
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