发明名称 |
Apparatus for automated loading of wafer cassette |
摘要 |
An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.
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申请公布号 |
US6135702(A) |
申请公布日期 |
2000.10.24 |
申请号 |
US19980089498 |
申请日期 |
1998.06.03 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
HUANG, GWO-JOU;HU, PING-YU;LEE, TON-LI;LIN, CHEN-SHIN |
分类号 |
B25J19/06;B65G49/07;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B25J19/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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