| 摘要 |
PROBLEM TO BE SOLVED: To efficiently recover the easily reusable slurry of abrasive grains as abrasive material slurry from the waste water of a polishing process. SOLUTION: This method for recovering a non-colloidal abrasive material includes the processes of microfiltering the waster water of a polishing process, condensing the filtrate by centrifugal separation, and washing the condensed liquid with water. This device for recovering the non-colloidal abrasive material is provided with a microfilter membrane means 1 for introducing the waste water of the polishing process, a centrifugal separating means 2 for introducing the filtrate of the microfiltering means, and a washing means 3 for water- washing the condensed liquid obtained by the centrifugal separating means 2.
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