| 摘要 |
PROBLEM TO BE SOLVED: To provide a microstructure array, such as a micro-lens array, facilitating enlargement and manufacturing processes, and high in controlling, relatively inexpensive, and small in in-plane distribution. SOLUTION: This manufacturing method for a microstructure array includes the processes of: forming an insulating layer 3 on a conductive portion 2 of a substrate 1, forming an opening 4 having a periodic repetitive array pattern on the insulating layer 3, and forming an electrodeposition layer 7 on the opening 4 and the insulating layer 3 through the opening 4 by the electrodeposition of the conductive portion 2 as a negative or positive electrode. The opening 4 is formed both on the periphery of a use area 5 in the microstructure, and in a dummy area 6 in series with the use area 5 and having an array pattern similar thereto.
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