发明名称 ACTIVE VIBRATION RESISTANT DEVICE, EXPOSURE DEVICE AND METHOD, AND MANUFACTURE OF DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an effective skyhook spring by feeding back respective outputs of an air spring actuator, a vibration measuring means and a position measuring means. SOLUTION: Output of a position measuring means PO is compared with output of a position desired value output part 1, and the deviation signal is introduced to a gain compensator 3 to be set as a position negative feedback loop. An acceleration/ speed signal of a vibration measuring means VS is inputted to motion mode extracting operation means 4, 5, a motion mode acceleration signal is introduced to a gain compensator 6 to obtain an optimal damping characteristic, and a motion mode speed signal is introduced to a gain compensator 7 to obtain a skyhook spring. Next, outputs of the compensators 6, 7 are added to be negatively fed back to a PI compensator 8, and a signal by adding a negative feedback signal of acceleration/speed to output of the compensator 3 is introduced to a motion mode distributing operation means 9. Output of a welding pressure measuring means PR of an air spring is introduced to a pressure detecting means 10, and this output is negatively fed back to a PI compensator 11. With such constitution, the skyhook spring can be easily and effectively obtained.
申请公布号 JP2000274482(A) 申请公布日期 2000.10.03
申请号 JP19990340515 申请日期 1999.11.30
申请人 CANON INC 发明人 WAKUI SHINJI
分类号 H01L21/027;F16F15/02;G03F7/20;(IPC1-7):F16F15/02 主分类号 H01L21/027
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