Monolithic silicon mass flow control structure

摘要

A monolithic silicon mass flow control structure is made by etching process to form a valve structure and a channel in a silicon chip, laser or electric discharge process to form a flow inlet and a flow outlet in a glass chip, and anode connection process to combine the silicon chip and the glass chip. At least a flow sensing element and a micro valve control element are disposed above the channel and the valve structure respectively for flow sensing and control purposes. A semi-complete product is sealed on a base board, wherein an output signal from the flow sensing element is compared with a pre-set value in an externally connected control circuit, which will change heating condition so as to control flow of the valve structure.